| 摘要 |
PURPOSE:To remarkably elevate accuracy of measurement by operating a centroidal position by a video output signal in accordance with distribution of the quantity of light, and measuring the displacement, in case when a reflected ray spot is formed on plural solid image pickup elements. CONSTITUTION:A light beam from the light source 1 is irradiated on an object to be measured A, the reflected ray forms a reflected ray spot on the solid image pickup unit 4 through the condensing lens 3, and a video signal which is obtained by being driven by the clock driver 5 is amplified by the amplifier 6. In this case, in addition, an arithmetic circuit 7 for operating a centroidal position of the reflected ray spot is provided. In this constitution, in case when a reflected ray spot as shown in the figure (a) has been formed, if there is no arithmetic circuit 7, the address is decided to either 2 or 3, and results in containing an error within 1 pitch. When it is operated by the arithmetic circuit 7, the centroidal address becomes 2.5. In this way, accuracy of measurement can be elevated. |
