发明名称 Method of applying thin metal deposits to a substrate
摘要 A method of applying thin metal sensitizing deposits to the exposed silicon areas of a silicon substrate having areas of exposed silicon and silicon oxide, including the steps of immersing the silicon substrate in a basic, aqueous solution containing a metal salt of the metal to be deposited, particularly a nickel, cobalt, or platinum salt, and thereafter reducing the metal ion of the salt to the elemental metal by use of the exposed silicon as the reducing agent.
申请公布号 US4297393(A) 申请公布日期 1981.10.27
申请号 US19800125639 申请日期 1980.02.28
申请人 RCA CORPORATION 发明人 DENNING, RICHARD;SPAK, MARK A.;POLHEMUS, BARRY
分类号 C23C18/28;(IPC1-7):C23C3/02;H01L21/28 主分类号 C23C18/28
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