| 摘要 |
PURPOSE:To obtain a cross pattern electrode having satisfactory linear width precision by overlapping the second pattern of slightly wider space width on a pattern of line and space, removing a line of the lower layer pattern and laying a conductor layer over the other after deforming the second pattern to the third pattern. CONSTITUTION:A resist is applied on a substrate to provide the first pattern of a line 11, space 12 and the line 11 is removed by providing a resist mask 14 having a window 15. Next, a resist mask 17 having a window 18 is provided to adhere a metallic film by the liftoff method. Thus a prearranged cross pattern electrode. |
