| 摘要 |
PURPOSE:To ensure sealing of gas so that the gas sealed in the gas rate sensor cannot be leaked externally, by contacting the hermetic seal base providing the ring shape projections at the joint plane to the joint plane of the flange of casing. CONSTITUTION:The casing 21 has the cell 22 of hollow and cylindrical shape, and one end of the cell 22 is choked with the end plate 23. On the other hand, another end of the said cell 22 is open to be the opening 24, and the flange 25 is provided at the circumference of the opening 24. Further, the hermetic seal base 41 has the base main body 24 of thick thickness, and thin flange 43 is formed at the circumference and the ring shape projections 45 are formed for the projection welding inside the flange 43. Further, the sensor main body 26 is contained to the specified position from the opening 24 of the casing 21 and it is contacted to the flange 25 of the casing 21. Thus, even gas with small molecules cannot be leaked externally. |
