| 摘要 |
PURPOSE:To detect the ionization current only with high sensitivity and to increase the resolution, by inserting and holding the electrode plate to the plural grooves where the end of electrode plate for high voltage and signal electrode plate, through the use of insulation support. CONSTITUTION:A radiant ray detector is located to the X-ray source via the objective. The X-ray source and radiant ray detector located opposingly expose X-ray beam pulsively while turning around the objective. Further, grooves 10a having fine pitch are formed on the insulation substance 13 of electrode plate, and the pitch accuracy can easily be made so that the width of X-ray path can be uniform, by forming the grooves 10a of fine pitch on the insulating substance of electrode plate and inserting the side end of the signal electrode 6 and high voltage electrode plate 7 where the bag shape conductive substance 9 is sticked at the side along the grooves. Thus, since processing can be done with high accuracy, the distance between the electrode plates and the resolution can be increased. |
