| 摘要 |
PURPOSE:To obtain the titled alloy target causing no cracks after casting and working, having high oxidation resistance, and requiring no presputtering as a sputtering target, by providing a composition consisting of Co, etc., Pt and/or Pd, and rare-earth elements and also by specifying respective contents of Pt and Pd. CONSTITUTION:An alloy is prepared so that it has a composition which consists of both of Fe and Co, or Co and either or both of Pt and Pd, and one or more kinds among rare-earth elements and in which Pt and/or Pd content is regulated to >=20atom.%. Moreover, it is desirable to use rare-earth elements other than Tb or Gd and Tb. A thin amorphous-alloy film obtained by using the above alloy target has superior magneto-optical characteristics, such as high coercive force invariable with the lapse of time, and further high reflectivity. |
