发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To obtain a P-well resistor of an always stabilized value in spite of an external factor by a method wherein an N type impurity with density thicker than a substrate density is injected into a P-well resistive region. CONSTITUTION:An N layer (thicker in density than the substrate by more than one figure) is formed on the N<->-substrate, and the P-well resistor 16 is burried between the N<->-substrate and the N layer 17. The N<->-substrate is applied the highest potential which is applied to CMOSIC, so that the N layer 17 is given the highest potential and the P-well resistor 16 is kept from being formed with channels due to an Al layer 12. For this reason, the value of the P-well resistor 16 is kept always constant even the external factor exists. For the formation of the N layer 17, the ions are allowed to selectively independently be injected after the formation of the P-well resistor 16 and otherwise, to be injected at the same time when sources and drains of N-channel MOSFET are formed. Thus, the ideal P-well resistor 16 thereon with the N layer 17.
申请公布号 JPS56134754(A) 申请公布日期 1981.10.21
申请号 JP19800037850 申请日期 1980.03.25
申请人 CITIZEN WATCH CO LTD 发明人 SEKINE MITSUO
分类号 H01L27/04;H01L21/822;H01L21/8238;H01L27/092;H01L29/78;H01L29/8605 主分类号 H01L27/04
代理机构 代理人
主权项
地址