发明名称 Cryopumping apparatus.
摘要 <p>A cryopump (10) consisting of cryopanels (26, 34) attached to an elongated source of refrigeration (16, 20) in which heat is transferred from cryopumping surfaces (26, 34) to various stages of refrigeration (12) by conduction including a chevron baffle or louver (24) mounted parallel to the long axis of the refrigerator source (16, 20) and directly to the warmest stage of refrigeration (16).</p>
申请公布号 EP0038185(A1) 申请公布日期 1981.10.21
申请号 EP19810301568 申请日期 1981.04.10
申请人 AIR PRODUCTS AND CHEMICALS, INC. 发明人 LONGSWORTH, RALPH CADY
分类号 F04B37/08;(IPC1-7):04B37/08 主分类号 F04B37/08
代理机构 代理人
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