摘要 |
<p>A cryopump (10) consisting of cryopanels (26, 34) attached to an elongated source of refrigeration (16, 20) in which heat is transferred from cryopumping surfaces (26, 34) to various stages of refrigeration (12) by conduction including a chevron baffle or louver (24) mounted parallel to the long axis of the refrigerator source (16, 20) and directly to the warmest stage of refrigeration (16).</p> |