发明名称 STRUCTURE AND FORMATION METHOD OF FINFET DEVICE
摘要 A semiconductor device structure and a forming method thereof are provided. A semiconductor device structure comprises a semiconductor substrate and a fin channel structure on the semiconductor substrate. The semiconductor device structure also comprises a gate stack covering a portion of the fin channel structure. The semiconductor device structure further comprises a source/drain structure adjacent to the fin channel structure and a doped region between the semiconductor substrate and the fin channel structure. In addition, the semiconductor device structure comprises a blocking layer between the fin channel structure and the doped region.
申请公布号 KR20160085692(A) 申请公布日期 2016.07.18
申请号 KR20150161599 申请日期 2015.11.18
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 CHING KUO CHENG
分类号 H01L29/78 主分类号 H01L29/78
代理机构 代理人
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