COMPACT, TWO-PHASE CHARGE-COUPLED-DEVICE STRUCTURE UTILIZING MULTIPLE LAYERS OF CONDUCTIVE MATERIAL

摘要

APPLICATION FOR PATENT -of- LLOYD R. WALSH -for- A COMPACT, TWO-PHASE CHARGE-COUPLED-DEVICE STRUCTURE UTILIZING MULTIPLE LAYERS OF CONDUCTIVE MATERIAL An improved charge-coupled-device gate structure utilizes three depositions of electrically conductive material to form electrodes, thereby allowing fabrication of two-phase CCD gate structures occupying less wafer surface area and operating at faster speeds than conventional charge-coupled-device gate structures.