EQUIPMENT FOR VAPOR GROWTH

摘要

PURPOSE:To improve the workability for taking a boat in and out by providing a wall body to cover a door body and having an opening which passes a substrate for boat arrangement in a vapor growth equipment wherein a driving mechanism for the door body linked with a movable substance for moving the substance for boat arrangement is provided. CONSTITUTION:A door body 4 is provided at one end section of a reaction tube 2 and a wall body 30 (32 is a chamber and 34 a cylinder for exhaustion) having an opening 31 passing a substance for boat arrangement 7 which covers the door body and is fixed to a movable body 16 and accomodates a boat 6 (5 is a water) in the substance 7. A driving mechanism 38 for the door body linked with a movable body 16 by a shaft or a gear or the like is provided to close the door body under the status that the body 7 moves backward (a solid line) and to open the door body under the status that the body 7 moves forward (a dotted line). In this way, the opening and closing of the door body accompanying with taking the boat in and out can automatically be performed. Therefore, workability will be improved and workers will not be exposed to poisonous gas.