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发明名称
VERFAHREN UND EINRICHTUNG ZUR AUSHEILUNG VON IMPLANTATIONSSCHAEDEN IN HALBLEITERN
摘要
申请公布号
DD151385(A1)
申请公布日期
1981.10.14
申请号
DD19800221098
申请日期
1980.05.14
申请人
SCHILLER,SIEGFRIED,DD;PANZER,SIEGFRIED,DD;KLABES,ROLAND,DD;DAENHARDT,JUERGEN,DD;DOEHLER,HEINZ,DD;BAHR,GOTTFRIED,DD
发明人
SCHILLER,SIEGFRIED,DD;PANZER,SIEGFRIED,DD;KLABES,ROLAND,DD;DAENHARDT,JUERGEN,DD;DOEHLER,HEINZ,DD;BAHR,GOTTFRIED,DD
分类号
H01J37/30;(IPC1-7):H01J37/30
主分类号
H01J37/30
代理机构
代理人
主权项
地址
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