| 摘要 |
PURPOSE:To ensure a quick formation of a vertical magnetized film on a substrate of a room temperature, by defining the area near the substrate as the positive potential to the evaporation source and at the same time carrying out a vacuum evaporation of Co and Cr while applying a high-frequency electric field. CONSTITUTION:A coil-shaped high-frequency electrode 17 is provided between the evaporation source 10 within a vacuum container 13 and the nonmagnetic substrate 2. Then the substrate 2 is set at a higher potential than the source 10 by means of the DC power source 19. On the other hand, a high-frequency electric field is applied between the high-frequency electrode 17 and the source 10 via the high-frequency power source 18. Then both Co and Cr that are evaporated from the source 10 by a heater 12 are excited by the high-frequency electric field and at the same time vacuum-evaporated on the substrate 2. In such method, a room temperature is effective for the substrate 2, and accordingly a resin film such as the polyethylene terephthalate or the like can be used for the substrate. Furthermore a high speed of several thousands Angstrom /sec is obtained to realize a vertical magnetized film that excels in a high-density recording performance. |
