发明名称 POSITION DETECTOR FOR SEMICONDUCTOR PELLET
摘要 PURPOSE:To detect the position of pellets of varied size by connecting photoelectric conversion elements to fibers precisely one to one after the fibers are bundled and arranged on a semiconductor pellet separated. CONSTITUTION:A photoelectric conversion element 7 detects the hue of an optical fiber 9 produced with an projection image 10 arrayed by a retaining section 8 to move a pellet carrier 3 and a part of the fiber is shielded. When a method of detecting a fixed corner of the pellet is employed, it enables the detection of the position thereof regardless of size and switching the output signal of the photoelectric conversion elements provides free selection of the corner of the pellet to be detected. When the position of the pellet with respect to the outline, the center thereof or the like is needed, the detection can be made simply by giving the outer dimensions of the pellets as an input information.
申请公布号 JPS56126935(A) 申请公布日期 1981.10.05
申请号 JP19800031112 申请日期 1980.03.12
申请人 KYUSHU NIPPON ELECTRIC 发明人 TSUTSUMI KOUICHIROU
分类号 H01L21/68;G01B11/02;H01L21/60;H01L21/66 主分类号 H01L21/68
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