| 摘要 |
PURPOSE:To heighten the washing effect by emmersing the lower end of a partition plate into a washing liquid to cut a space on the intake side off the side of throwing the liquid. CONSTITUTION:A work 17 is immersed into an etching liquid 12 in a tank 1 and held and immersed into a washing jig in a tank 2 from the side of throwing an etching draft 6. The jig 9 is forced into the side of a washing draft 7 with a grip 8 of the jig. When the grip 8 gets into contact with a partition 5, working is done on the washing draft side and then, the work is taken out. Then, the work is placed into a washing liquid 11 in a tank 3 high in the purity. As the partition plate 5 penetrates into the surface layer of a washing liquid 10 in the tank 2, no floating contaminant flows into the liquid surface on the washing draft 7 side. The work taken out is free from the attachment of the contaminant while the partition plate 5 prevents entry of the contaminating gas on the etching draft side into the washing draft side thereby improving the washing effect. |
