| 摘要 |
PURPOSE:To prevent an exhausting system and tube from pollution with oil steam, by keeping the pressure in the tube less than a definite pressure by using a clario pump as the main pump in the exhaustion stage without employing an oil steam jetter, and to stabilize characteristics of the luminous tube. CONSTITUTION:A clario pump 2' is used as the main pump in the exhausting system in place of an oil-difusing pump. Gases in the pump can be removed by an oil- rotating pump 1 when a vacuum value 3 is opened. Further a trap 14 is equipped for preventing the clario pump 2' from flowing oil steam in the oil rotating pump into the clario pump 2'. The pressure in the luminous tube is made less than 10<-6> Torr by using the clario pump 2'. Thus, increase of the starting pressure and decrease of light bundle-maintaining ratio can be prevented and stable luminous way can be attained. |
