| 摘要 |
PURPOSE:To make shielding against the leakage of sputter particles more perfect by providing an another shield body further on the outer side of a sputter particle shield body. CONSTITUTION:A shield body 8 for sputter particles 7 is provided freely removably in a manner as to enclose the neighborhood of a sample 5. The sample 5 is loaded in a fine adjusting mechanism 9. The shield body 8 for sputter particles 7 is supported by a supporting body 10 from the base plate part of the mechanism 9. Therefore, the shield body 8 is always held in the same position irrespective of the fine adjustment of the sample 5. The sputter particles 7 leaking through the hole parts of the shield body 8 are further shielded by the another shield body 11 installed freely removably adjacently to the inside wall of a sample chamber 6. |
