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摘要
申请公布号
JPS5641697(B2)
申请公布日期
1981.09.30
申请号
JP19730079831
申请日期
1973.07.17
申请人
发明人
分类号
C23C12/00;C23C12/02;G04B37/22
主分类号
C23C12/00
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