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发明名称
摘要
申请公布号
JPS5641600(B2)
申请公布日期
1981.09.29
申请号
JP19730074751
申请日期
1973.07.04
申请人
发明人
分类号
H01J9/04;C01B35/04;C23C26/00;C30B19/12;C30B29/10;H01J1/14
主分类号
H01J9/04
代理机构
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