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发明名称
摘要
申请公布号	JPS5641168(B2)	申请公布日期	1981.09.26
申请号	JP19770130651	申请日期	1977.10.31
申请人		发明人
分类号	H01L21/316	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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