| 摘要 |
PURPOSE:To carry out the subject surface treatment of steel parts stably in a short time by utilizing hollow cathode glow discharge to increase the ionic density of glow discharge. CONSTITUTION:Discharge chamber 18 is formed with metal plate 12 having through holes 12a, 12b, connecting members 13, 15, insulating tube 14 and cover 16. In chamber 18, anode 26 and holders 23a, 23b for tubular parts 24a, 24b to be treated are set opposingly to each other, and gaseous N2 is introduced from cylinder 22 into chamber 18 through the interiors of parts 24a, 24b. By applying a high voltage between anode 26 and parts 24a, 24b from power source 33, hollow cathode glow discharge is generated between them to treat the insides of parts 24a, 24b by ion nitriding. Since the hollow cathode glow discharge has high ionic density and is stable, the ion nitriding is performed rapidly and stably. |
