发明名称 VACUUM DEPOSITING METHOD
摘要 PURPOSE:To easily form a thick vacuum deposited film or a laminated film of different vacuum deposited substances by combinedly placing a plurality of evaporation sources and coolers in a vacuum depositing apparatus. CONSTITUTION:Two zones of evaporation source 1, 1' are set in a vacuum depositing vessel, and coolers 2, 2' are placed opposedly to zones 1, 1'. Substance 7 such as synthetic resin film, paper or cellophane is fed to the 1st cooling roll 2 from unwinder 3 through guide roll 5 to carry out primary vacuum deposition over the 1st zone 1. Substance 7 is then shifted to the 2nd cooling roll 2' to carry out secondary vacuum deposition on the primary deposited layer with the 2nd zone 1'. By repeating this treatment plural times, a thick deposited layer can be formed easily. To form a laminated deposited layer, evaporation sources of different materials may be used.
申请公布号 JPS56119772(A) 申请公布日期 1981.09.19
申请号 JP19800022503 申请日期 1980.02.25
申请人 KOGATA MASAMI 发明人 KOGATA MASAMI
分类号 C23C14/56 主分类号 C23C14/56
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