| 摘要 |
<p>A coordinate locating device (8) includes an apparatus (10) having first, second, and third members (21, 22, 23) such that the first member (21) is movable on a base (14), the second member (22) is movable on the first member (21) and the third member (23) has a positionable element (30) and is movable on the second member (22). The device (8) also includes a laser transducer system (16) for establishing the locations of a starting point (52) and a first plane (54) through the starting point (52) which is associated with the first members (21), a second plane (58) having a second reference point (59) which is associated with the second member (22), and a third plane (62) having a third reference point (63) which is associated with the third member (23), and establishing the precise three dimensional location of the positionable element (30). Preferably, a plurality of laser beam reflectors are arranged in a preselected pattern on each of the first, second and third members (21, 22, 23) for reflecting a corresponding plurality of laser beams back toward the associated elements mounted on the base, first and second members (14, 21, 22) respectively, so that yaw, pitch and roll movements can be measured in addition to simple X, Y and Z linear displacement between the various moving stages thereof. </p> |
