| 摘要 |
PURPOSE:To detect individually if gas leaks or not, by sealing different gases in each cap for hermetic sealing. CONSTITUTION:He and Kr gases are sealed in the cap 11 and cap 12 respectively. The substrate 10 on which the caps are placed is contained in a container 20 and decompression is performed. The gas which leaks is analysed by the analyser 21, and the detectors 22, 23 detect from which cap gas leaks. With such an arrangement, the leak and the ratio of leak etc. from a plural number of hermetic seal caps are detected individually contributing to the more effective judgement on the quality of hermetic sealings. |
