发明名称 SEMICONDUCTOR DEVICE AND PROCESS FOR PRODUCING THE SAME
摘要 <p>SEMICONDUCTOR DEVICE AND PROCESS FOR PRODUCING THE SAME A polycrystalline silicon is used for a resistor element of a semiconductor device instead of a conventional, diffused resistor or a channel resistor, in which the channel resistance of an MOS transistor is utilized as the resistor. The length of a polycrystalline silicon layer for the resistor element is predetermined by the other polycrystalline silicon layer, formed above the resistor element. The structure of the semiconductor device according to the present invention is suited for a high density integrated circuit.</p>
申请公布号 CA1109165(A) 申请公布日期 1981.09.15
申请号 CA19780317243 申请日期 1978.12.01
申请人 FUJITSU LIMITED 发明人 SHIRAI, KAZUNARI;TANAKA, IZUMI
分类号 H01L27/04;G11C11/412;H01L21/02;H01L21/3205;H01L21/822;H01L21/8244;H01L23/52;H01L27/06;H01L27/11;(IPC1-7):01L27/00 主分类号 H01L27/04
代理机构 代理人
主权项
地址