| 摘要 |
PURPOSE:To obtain measured signals with high accuracy even when the measuring range of the extent to be measured is changed by controlling constant current regarding a current signal in proportion to the voltage signal corresponding to the extent of displacement detected by a semiconductor strain gauge as the extent to be corrected. CONSTITUTION:Detecting part 6 has a semiconductor strain gauge where gauge resistances 60-63 are diffused to the diaphragm consisting of silicon monocrystal; gauge resistances 60-63 are variable resistance; 64 and 65 are bridged and a voltage signal in proportion to the pressure difference to be measured is applied from variable resistances 64 and 65 to input terminals (m) and (n) of output amplifier 4. Terminals (d) and (f) of correcting circuit 8 are connected to terminals (g) and (h) of detecting part 6 and current in proportion to the bridge output voltage is applied from terminal (j) through terminal C of current controlling circuit 7 so that the bridge output voltage can be outputted as current. Thus, nonlinear errors can be corrected automatically even when the measuring range of the extent to be measured is changed, making it possible to obtain measuring signals with high accuracy. |
