| 摘要 |
PURPOSE:To improve workability and prevent the contamination of a wafer by automatically changing carrying conditions when offering and supplying work, and when passing work. CONSTITUTION:An offering feeding portion A with an H-shaped space 3 is provided in the middle of a carrying passage 2, and a stand 14 completely isolated while going up and down and H-shaped boards 15, 16 are connected together with a guide 17. The stand 14 goes upward and downward with a screw shaft 5 which rotates. A guide 19 provided with a conveyer mechanism 18 used to jet air upward is installed at the center of the board 15. A bearing bar 6 is provided in parallel with and above the board 16, and an engaging groove 7 is formed to attach a connecting piece 9 of a cartridge 8. While allowing the stand 14 to go down, wafers 1 are sent out of the cartridge one after another to a carrying passage 2 to offer and feed them. When offering and feeding are not carried out, the stand 14 is elevated and the tunnel portion is made to pass, facing the carrying passage 2. Due to the air conveyer in the tunnel portion, the wafer is smoothly carried without contamination. At the same time, offering and passing can be automatically changed, so that workability as well as yielding rate are also improved. |
