| 摘要 |
PURPOSE:To equalize a thickness and quality of an evaporation coating, in the evaporating boat formed by a boat main body, an intermediate plate and a top lid, by thickening a thickness of the top lid thicker than that of the boat main body. CONSTITUTION:The evaporating boat for subjecting a sublimable substance to the evaporation is formed from the boat main body 1, the intermediate plate 3 and the top lid 2. To the top lid 2 and the intermediate plate 3, openings 2a and 3a which are not coincided to an upper and a lower directions are formed and, in a recessed part of the main body 1, an evaporating substance 4 is received. In this case, by adjusting the thickness of the top lid 2 to 1.5-3 times that of the boat main body 1, in evaporating said substance 4 by passing current to the boat, because electroconductivity of the top lid 2 becomes well and temp. rise of said top lid 2 itself becomes higher, said evaporating substance is not coagulated at the opening part 2a and a constant amount of the evaporating substance is always evaporated from said opening part 2a because a size of said opening part 2a does not become smaller. Therefore, a constant evaporating operation is always carried out stably. |
