| 摘要 |
PURPOSE:To enhance a evaporation speed of Au or Ag by coating a specific metal with a high m.p. to the surface of a heater of vacuum evaporation made of electroconductive ceramics by wire detonation spraying to make wettability of said heater with Au or Ag well. CONSTITUTION:The boat like and crucible like electroconductive heater made of ceramics as the heater of vacuum evaporation is prepared from ceramics based on TiB2 or BN or a carbon material such as graphite or the like. These materials are inferior to wettability with Au or Ag so that, in subjecting Au or Ag to vacuum evaporation, brought into a spherical shape and the evaporation speed thereof is low. In order to improve these problems, to a part contacted with Au or Ag molten by the aforementioned heater, at least one or more of a high m.p. metal such as W, Mo or Ta is coated by wire detonation spraying. Thereby, the wettability of the coating layer of said high m.p. metal and said molten Au or Ag is increased and the evaporation speed Au or Ag is increased to a large extent as well as the evaporation speed is also enhanced. |
