发明名称 ETCHING LIQUID FOR PLATING PRETREATMENT OF ZIRCONIUM TYPE METAL
摘要 PURPOSE:To provide an etching liquid for the plating pretreatment of a Zr type metal to which a selectivity for generating etched pores, enhanced adhesiveness with a plated film and improved treating capacity of said liquid are imparted by adding a specific org. quaternary ammonium salt to an aqueous hydrogen fluoride solution. CONSTITUTION:In an aqueous hydrogen fluoride solution, an org. quaternary ammonium salt shown by the formula [wherein R' and R'' are H, 1-4C alkyl group, aryl group, benzyl group, CH2COOR''', (n) is 0 or 1-8, (m) is 5-5,000, X is a halogen atom, -SO3R', -OSO3R', R''' is H or an 1-4C alkyl group], for example, polyamine sulfone is contained in an amount of 10-500ppm. Said aqueous hydrogen fluoride solution is generally used at a pH of 2-4 and at a concn of 0.1- 1.0mol/l. If said aqueous solution is used in etching said Zr type metal, etched pores are selectively formed on a surface of said metal and, if used in pretreating prior to plating treatment, the close adhesiveness of the plating film is enhanced.
申请公布号 JPS56116879(A) 申请公布日期 1981.09.12
申请号 JP19800018503 申请日期 1980.02.19
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 HAYATA TERUNOBU;MATSUDAIRA MITSUO;HIZUKA JIYUNJI;ENDOU AKIRA
分类号 C23F1/26;H01L21/308 主分类号 C23F1/26
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