| 摘要 |
PURPOSE:To avoid the inspection mistake within permissible range, by moving the standard pattern within predetermined range, producing the greater and smaller standard pattern than the standard pattern and comparing the standard pattern with the pattern to be inspected. CONSTITUTION:The pattern to be inspected 1 is set to the reference location with pulse motors 2, 3 and pickup is made by a camera 6. The signal obtained from the camera is stored in the internal memory 10. On the other hand, the standard pattern data is read out from the external memory 11 to the internal memory 10'. Next, the pattern data to be inspected stored in the content memory 10 and the standard pattern data stored in the internal memory 10' are in series or parallel compared. The pattern data to be inspected is judged good if it satisfies a condition to the two standard pattern data of logical sum and product. |
