发明名称 |
Ion source having improved cathode |
摘要 |
A direct heated rod-shaped cathode for an ion source is provided with a region of reduced cross-section adjacent its negative end to maximize the path length of electron movement within the discharge chamber and to provide effective control of the cathode resistance in a region that is relatively free of sputtering erosion during use.
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申请公布号 |
US4288716(A) |
申请公布日期 |
1981.09.08 |
申请号 |
US19790099369 |
申请日期 |
1979.12.03 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
HINKEL, HOLGER;KRAUS, GEORG |
分类号 |
H01J27/14;H01J37/08;H01L21/265;(IPC1-7):H01J27/00 |
主分类号 |
H01J27/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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