| 摘要 |
PURPOSE:To improve the reliability of an ink jet head and increase printing accuracy by a method wherein glass paste with the low melting point is printed on a multinozzle plate consisting of a silicon monocrystal in a screen shape, the paste is melted and the multinozzle plate and liquid-chamber structures are connected. CONSTITUTION:The surfaces of a multinozzle plate 1, in which a silicon monocrystal wafer is photoetched in an anisotropic shape and a plurality of nozzles 2 are made up, and glassy liquid-chamber strcutures 3 are grease-removed, washed and dried. Glass paste 5 with the low melting point is printed on a connecting surface of the multinozzle plate in a screen shape in beltlike patterns surrounding each nozzle. The glass paste printed is dried for 15min at 125 deg.C, and a solvent section is previously evaporated. The liquid-chamber structures and the multinozzle plate are stacked, baked (for 15-30min at 380-450 deg.C), and connected. |
