| 摘要 |
PURPOSE:To enable positioning within an XY plane at high acceleration by arranging a pair of monoaxial motors formed by two linear pulse motors having three- phase structure opposedly to each other on a stator having grid-shaped teeth. CONSTITUTION:On a moving unit 1 are fixed the linear motors X1 and X2 moving in the direction X and the linear motors Y1 and Y2 moving in the direction Y, which are arranged perpendicularly to each other, and X1 and Y1, as well as X2 and Y2, are tightly connected with each other by permanent magnets 2 and 3. Moreover, the stator 4 is provided with grid-shaped teeth of pitch P, while with respect to the motors X and Y, coils C1-C3 are wound round a yoke 5 having three legs 10, 20 and 30, which are located in divergence by N+ or -1/3P from each other, and the teeth of pitch P are formed at the tip part thereof. Accordingly, by exciting the coils C1- C3 sequentially, the moving unit 1 can be moved in the directions X and Y and positioned and, in addition, the acceleration thereof can be increased by reducing the weight thereof. |
