发明名称 DETECTOR FOR INCLINATION OF EXTREMELY SMALL PIN IMPLANTED IN FLAT PLATE
摘要 PURPOSE:To measure the slanting direction of a pin and its extent accurately in a short time by fitting to the pin an inserted bar coupling with the pin, by projecting a parallel beam upon a mirror surface provided to the head of the bar from above, and by detecting the position of the refleted beam. CONSTITUTION:Inserted part 3 is fitted which couples with pin 4 implanted in flat plate 5 fixed on XY table 6. Inserted part 3 has a mirror surface at its head part. A parallel luminous flux from irradiating means 1 fixed to the top of frame 7 lightens the mirror surface of the inserted part via hole 22 in the center of a detecting means, and its reflected spot is projected upon detecting means 2. Detecting means 2 has scale 23, extending radially from hole 22, and scale 24, drawn concentrically with hole 22, on transparent disk 21 made of glass or synthetic resin. From the position of the reflected spot, the slating direction of pin 4 and its extent can be measured easily in a short time.
申请公布号 JPS56111408(A) 申请公布日期 1981.09.03
申请号 JP19800013682 申请日期 1980.02.08
申请人 HITACHI LTD 发明人 KANEHARA NOBUHIDE
分类号 G01B11/26;(IPC1-7):01B11/26 主分类号 G01B11/26
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