| 发明名称 |
Surface treating composition for micro processing |
| 摘要 |
A surface treating composition for micro processing which comprises a mixture of hydrofluoric acid, ammonium fluoride solution and water, and at least one compound selected from the group of surfactants consisting of aliphatic carboxylic acids, salts of aliphatic carboxylic acids, aliphatic amines and aliphatic alcohols.
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| 申请公布号 |
US4795582(A) |
申请公布日期 |
1989.01.03 |
| 申请号 |
US19870099463 |
申请日期 |
1987.09.21 |
| 申请人 |
HASHIMOTO CHEMICAL INDUSTRIES CO., LTD. |
发明人 |
OHMI, TADAHIRO;MIKI, NOBUHIRO;KIKUYAMA, HIROHISA |
| 分类号 |
C09K13/08;H01L21/306;H01L21/308;H01L21/311;(IPC1-7):C09K13/08 |
主分类号 |
C09K13/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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