| 摘要 |
PURPOSE:To improve the stress measurement efficiency and measurement precision of a stress measuring device by constituting amplification and processing sytem in one system by using a couple of detectors formed from the same single crystal and having the same characteristics. CONSTITUTION:White X-rays radiated from white-X-rays source 2 strike sample 3 and are diffracted by sample 3. Those diffracted X-rays are detected by semiconductor detectors 4 and 5 made of the same single crystal. Their detection signals, after amplified by preamplifiers 6 and 7, are inputted to main amplifier 9 via the 1st multiplexer 8. The amplified signal is inputted to multichannel analyzer 11 for an energy analysis via the 2nd multiplexer synchronized with the 1st multiplexer 8. Analysis values of it are stored in memories 12 and 13 respectively and the stored values, when showing sufficient energy, are outputted to and analyzed by computer 14 to obtain the stress value of the sample. Thus, the efficiency and precision of the measurement can be improved. |
