摘要 |
PURPOSE:To detect both humidity and reducing gas separately by using a ceramic semiconductor element of P type metal oxide and performing detection of humidity with ionic conduction at a fixed temperature or below, while performing detection of reducing gas with electronic conduction in the area of high temperature. CONSTITUTION:A complex gasification sensor element 1 is constituted by the ceramic semiconductor 2 of P type metal oxide such as, for instance MgCr2O4, by electrodes 3 and 4 of RuO2 system, for instance, formed on both side surfaces of the semiconductor 2 and by lead wires 5a and 5b led out from the electrodes 3 and 4. When the detected ambient temperature is 150 deg.C or less, the detection of humidity is performed with ionic conduction of the semiconductor 2, while at the temperature within the range of 200-600 deg.C the detection of reducing gas is conducted with electronic conduction. |