| 摘要 |
PURPOSE:To correctly measure the temp. of a base material for plating in a noncontact system through a glass plate and a tube by installing the tube so that it pierces through part of a plating reactor, hermetically seal the outside edge of the tube with the glass plate, and feeding a carrier gas into the reactor. CONSTITUTION:Tube 9 for taking out heat radiation for measurement is installed in vapor phase plating apparatus 1 so that it pierces through sealant 3 and extends near to base material A for plating in plating reaction chamber 4, and outside edge 10 of tube 9 is hermetically sealed with optical glass 11. A carrier gas is introduced from inlet pipe 13 close to edge 10 and fed into chamber 4 from inside edge opening 12 of tube 9 to inhibit plating vapor from flowing in tube 9. Thus, in vapor phase plating the temp. of base material A can be measured correctly with heat radiation which reaches body 14 of the temp. measuring unit through tube 9. |
