发明名称 |
Two-coordinate positioning device |
摘要 |
A positioning device with two coordinates, for the moving of two components relative to each other. The positioning device with two coordinates serves for the exact positioning of a tool or workpiece, preferably of semi-conductor discs, for the purpose of checking or fabricating in the course of the manufacturing process.
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申请公布号 |
US4286197(A) |
申请公布日期 |
1981.08.25 |
申请号 |
US19790015283 |
申请日期 |
1979.02.26 |
申请人 |
EBERHARD, RIESSLAND;BEYER, HELMUT;KOSSMAN, ERICH |
发明人 |
EBERHARD, RIESSLAND;BEYER, HELMUT;KOSSMAN, ERICH |
分类号 |
G01B7/00;G01D5/12;H02K41/03;(IPC1-7):H02K41/00 |
主分类号 |
G01B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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