发明名称 Two-coordinate positioning device
摘要 A positioning device with two coordinates, for the moving of two components relative to each other. The positioning device with two coordinates serves for the exact positioning of a tool or workpiece, preferably of semi-conductor discs, for the purpose of checking or fabricating in the course of the manufacturing process.
申请公布号 US4286197(A) 申请公布日期 1981.08.25
申请号 US19790015283 申请日期 1979.02.26
申请人 EBERHARD, RIESSLAND;BEYER, HELMUT;KOSSMAN, ERICH 发明人 EBERHARD, RIESSLAND;BEYER, HELMUT;KOSSMAN, ERICH
分类号 G01B7/00;G01D5/12;H02K41/03;(IPC1-7):H02K41/00 主分类号 G01B7/00
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