发明名称 ETCHING APPARATUS
摘要 PURPOSE:To perform uniform etching and to prevent decrease in etching magnification, by providing a main etching tub in an immersing tub, and providing bottom screening plates having the rollers, which are rotated in association with the running of an aluminum foil to be etched, at the bottom part of the main etching tub. CONSTITUTION:An aluminum foil 1 passes between bottom screening plates 2 and 3 from an immersing tub 7 and enters into a main etching tub 6, where etching is performed. In this case, rollers 4 and 5 are arranged at the tip parts of the bottom screening plates 2 and 3. Since the rollers 4 and 5 are associated with the running of the aluminum foil 1, the rollers 4 and 5 can be brought to close proximity without imparing the aluminum foil 1. The main etching tub 6 and the immersing tub 7 can be completely separated. Therefore, the increase in current at the part of the main etching part becomes very quick, and the uniform etching is performed. Thus the decrease in etching magnification can be prevented.
申请公布号 JPS649612(A) 申请公布日期 1989.01.12
申请号 JP19870164515 申请日期 1987.07.01
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 EBARA JUN;HASEGAWA NOBORU;KOJIMA KOICHI;KANZAKI NOBUYOSHI;SHIMATANI RYOICHI
分类号 H01G13/06;H01G13/00 主分类号 H01G13/06
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