发明名称 PRODUCTION OF TUNING FORK TYPE QUARTZ OSCILLATOR
摘要 PURPOSE:To simplify the production of a tuning fork type quartz oscillator, by using no photoprocess. CONSTITUTION:The quartz plate 1 is masked with the mask 6-A which is blanked into a number of tuning forks. Under these conditions, a vapor deposition or sputtering is applied to secure sticking of a metallic film into a tuning fork. Thus a number of tuning fork type metallic films are obtained after removing the mask. These metallic films are put into the etching solution of fluorine or the like to give an etching to the plate 1, thus obtaining a tuning fork type quartz oscillator bar. Thereafters the metallic films 2 and 3 are all removed, and the plate 1 is masked with the electrode forming mask 6-B which is blanked into a prescribed form. Under such conditions, the metallic film is stuck to the plate 1 by the vapor deposition and sputtering method. Finally the mask 6-B is removed to obtain a number of consecutive tuning fork type quartz oscillators.
申请公布号 JPS56106412(A) 申请公布日期 1981.08.24
申请号 JP19800008617 申请日期 1980.01.28
申请人 SEIKO INSTR & ELECTRONICS 发明人 KUDOU AKIHITO
分类号 H03H3/02;(IPC1-7):03H3/02 主分类号 H03H3/02
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