| 摘要 |
PURPOSE:To suppress the fluctuation of pressure in a reactor caused by the variation of the gas exhausting speed of an exhaust system, by equipping tanks storing an exhaust gas temporarily, a pressure detector, and a regulator for controlling flow of the exhaust gas between an exhaust vent and the exhaust system. CONSTITUTION:Between the exhaust vent 13 and the exhaust system 17, the tanks 19 and 19' for reserving a exhaust gas temporarily, and the water 20 and 20' for precipitating fine glass powder is put in the bottom of the tanks 19 and 19'. The pressure detector 15, the regulator for controlling flow of exhaust gas 16 and the control circuit 18 are provided. A ratio of the gas velocity v1 in the arrow 14 direction to the exhaust gas velocity v2 of the exhaust system v1/v2=1.8 is made a standard value. Pressure in the reactor 6 is detected by the pressure detector 15, and the feed back of the signal through the control circuit 18 to the regulator for controlling of exhaust gas 16 is carried out, to make the pressure in the reactor 6 constant. A gas for bias can be made to flow together with the exhaust gas. |
