| 摘要 |
A power transfer network for efficiently coupling a source of high frequency energy to a physically large dimensioned electrode system in a sputtering machine which exhibits high spray capacitance to ground. The network includes an inductive element capable of being tapped along its length such as a linear line section and a tuning capacitor with the source of high frequency energy in the megahertz range, each of the source and the electrode system being connectively tapped into a suitable location along the inductive element.
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