| 摘要 |
PURPOSE:To prevent the arcing and the mode jamp of a magnetron and to improve the service life by additionally providing a process for coating a protective film of material corresponding with the metal of cathode substrate in accordance with the usage onto the cathode surface. CONSTITUTION:A cathode 1 immersed with an electron emission material is assembled with a cathode tube 2 and inserted into a jig 3 to expose the cathode 1 and connected to the positive electrode 4. A target 6 such as WO3 is held on the other electrode 5, then high frequency voltage is applied from a power source 8 under inert ambience such as Ar 7. When applying the high frequency high voltage from such equipment, the Ar gas is ionized to positive ion having high energy and enters into the negative side of the electrode or WO3 face which receives high energy and emit itself to be adhered to the surface of the cathode 1. Consequently it can be adhered effectively on an emission material as a protective film resulting in considerable lengthening of the magnetron. |
