| 摘要 |
PURPOSE:To accurately and automatically discriminate the propriety of the silicon wafer by displaying the inspected result of the Si wafer by a microscope on a display unit, recording it in a magnetic memory and recording it in a motor-driven printer. CONSTITUTION:A wafer supply magazine indexing mechanism 102, a good wafer containing magazine indexing mechanism 103, regenerated wafer containing magazine indexing mechanism 104 and an improper wafer containing magazine indexing mechanism 105 are provided on a substrate 101 having an operation panel 109 having a keyboard 110 for controlling the focus of a microscope 1 the wafer is operated by the first magnetic memroy for recording the program of the wafer inspecting position and the program of the type of the defect, the inspected result is indicated on the display unit 108, recorded simultaneously on the second magnetic memory, the respective wafers are transferred to the respective magazines on the basis of the discrimination of the propriety, and the results are displayed on the motor driven printed as required. Thus, the inspecting work can be automated to be accurate. |
