| 摘要 |
PURPOSE:To enable the measurements of the composition and thickness of the thin film by confronting anodes adjustable at an interval there-between at an electrode of a substrate side formed with a deposited film by the device for forming the thin film as a cathode and providing an optical window for discharging a glow discharge light generated between the electrodes. CONSTITUTION:Parallel plate-shaped electrodes 4 and 5 are provided within a bell- jar 1 of the device for forming the thin film, a film is formed on the substrate 6 on the electrode 5. Then, with the electrode 5 as a cathode and with an auxiliary electrode 7 (8 is electrode moving means) provided adjustably at an interval from the electrode 5 as an anode, a DC voltage is applied between the electrodes 5 and 7 to produce an abnormal glow discharge, the glow discharge light generated due to the discharge is produced from the optical window 9, and the composition and the thickness of the film are thus measured. Thus, since the analysis of the composition of the thin film and the measurement of the thickness of the film can be conducted without removing the specimen, the efficiency of the experiments can be increased. |
