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发明名称
摘要
申请公布号
JPS56501132(A)
申请公布日期
1981.08.13
申请号
JP19800502335
申请日期
1980.09.11
申请人
发明人
分类号
H01L21/302;B01J19/12;C23C14/00;C23C14/22;C23C14/24;C23C16/517;C23F1/08;H01L21/3065;H05B6/80;H05H1/46
主分类号
H01L21/302
代理机构
代理人
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地址
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