分类号 |
H01L21/28;G11C11/35;G11C11/404;G11C11/412;H01L21/033;H01L21/306;H01L21/316;H01L21/32;H01L21/3205;H01L21/322;H01L21/336;H01L21/76;H01L21/768;H01L21/822;H01L21/8242;H01L27/04;H01L27/10;H01L27/108;H01L29/78;(IPC1-7):H01L21/22;H01L21/31 |
主分类号 |
H01L21/28 |