发明名称 FORMING METHOD FOR LOW RESISTOR OF HYBRID INTEGRATED CIRCUIT
摘要 <p>PURPOSE:To obtain the low resistance resistor having large electric power capacity by covering an insulating layer on a good thermal conductive metal substrate, forming a conductive path thereon, covering the edge of the path with a mask and forming an Ni-plated layer from the end of the path to the exposed part of the insulating layer. CONSTITUTION:An Al2O3 film 3 as an insulator is formed on an aluminum substrate having good thermal conductivity, and a copper foil 4 is bonded through an adhesive resin 3 thereon. Then, the copper foil 4 is etched to a predetermined pattern with a solution such as ferric chloride or the like, a conductive path 4 formed of the copper foil 4 is thus formed, a resist film 6 is covered on the part except the resistor forming part and exposed rough Al2O3 film 2, the part covered with no film 6 is activated, and Ni may be easily adhered. Thereafter, Ni-plating is conducted, Ni low resistance resistor 7 is formed on the part covered with no film 6, the film 6 is removed together with the Ni covered on the edge, and the resistor 7 of predetermined shape is thus formed.</p>
申请公布号 JPS5696848(A) 申请公布日期 1981.08.05
申请号 JP19790107467 申请日期 1979.08.22
申请人 SANYO ELECTRIC CO;TOKYO SANYO ELECTRIC CO 发明人 KAZAMI AKIRA
分类号 H01C17/06;H01L21/70;H01L21/822;H01L27/04 主分类号 H01C17/06
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